An integrated magnetic programming technique for mechanical microresonators

Ali Mohammadi, Bhaskar Choubey, Mehmet R. Yuce, Nemai C. Karmakar

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Abstract

Mechanical memory devices are needed for harsh environments where electronic components fail to operate. An integrated electro-Thermal technique for local magnetic annealing, which enables post-production programming capabilities for mechanical micro-resonators is presented. It is verified by a prototype with ferromagnetic resonating elements suspended on top of a polysilicon resistive heater. The magnetization (M-H) loop, with and without post-fabrication annealing are measured to prove the validity of technique.

Original languageEnglish
Title of host publication2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
PublisherIEEE
Pages485-488
Number of pages4
ISBN (Electronic)9781509030590
DOIs
Publication statusPublished - 29 Aug 2017
Event12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 - Los Angeles, USA United States
Duration: 9 Apr 201712 Apr 2017

Publication series

NameIEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
PublisherIEEE
ISSN (Electronic)2474-3755

Conference

Conference12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
CountryUSA United States
CityLos Angeles
Period9/04/1712/04/17

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation

Cite this

Mohammadi, A., Choubey, B., Yuce, M. R., & Karmakar, N. C. (2017). An integrated magnetic programming technique for mechanical microresonators. In 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 (pp. 485-488). [8017069] (IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)). IEEE. https://doi.org/10.1109/NEMS.2017.8017069