An integrated magnetic programming technique for mechanical microresonators

Ali Mohammadi, Bhaskar Choubey, Mehmet R. Yuce, Nemai C. Karmakar

Research output: Chapter or section in a book/report/conference proceedingChapter in a published conference proceeding

73 Downloads (Pure)

Abstract

Mechanical memory devices are needed for harsh environments where electronic components fail to operate. An integrated electro-Thermal technique for local magnetic annealing, which enables post-production programming capabilities for mechanical micro-resonators is presented. It is verified by a prototype with ferromagnetic resonating elements suspended on top of a polysilicon resistive heater. The magnetization (M-H) loop, with and without post-fabrication annealing are measured to prove the validity of technique.

Original languageEnglish
Title of host publication2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
PublisherIEEE
Pages485-488
Number of pages4
ISBN (Electronic)9781509030590
DOIs
Publication statusPublished - 29 Aug 2017
Event12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 - Los Angeles, USA United States
Duration: 9 Apr 201712 Apr 2017

Publication series

NameIEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
PublisherIEEE
ISSN (Electronic)2474-3755

Conference

Conference12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
Country/TerritoryUSA United States
CityLos Angeles
Period9/04/1712/04/17

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation

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