An analytical model of micromachined electromagnetic inductive contactless suspension

Kirill V. Poletkin; Alexsandr I. Chernomorsky; Christopher Shearwood; Ulrike Wallrabe

doi:10.1115/IMECE2013-66010

An analytical model of micromachined electromagnetic inductive contactless suspension

Kirill V. Poletkin, Alexsandr I. Chernomorsky, Christopher Shearwood, Ulrike Wallrabe

Research output: Chapter or section in a book/report/conference proceeding › Chapter in a published conference proceeding

12 Citations (SciVal)

Abstract

The paper presents an analytical model of a micromachined electromagnetic inductive contactless suspension, which describes the dynamics of a levitated disk shaped proof mass in space, near an equilibrium point. The proof mass is levitated in an electromagnetic field created by a ring shaped coil. The model derives from the analysis of the set of Lagrange - Maxwell equations obtained for the proof mass - coil system in a general form. Also the condition for the stable levitation of the proof mass in space is developed and expressed in terms of coefficients of the quadratic form of a function of mutual inductance between the disk shaped proof mass and ring shaped coil.

Original language	English
Title of host publication	ASME 2013 International Mechanical Engineering Congress and Exposition
Place of Publication	U. S. A.
Publisher	The American Society of Mechanical Engineers(ASME)
ISBN (Print)	9780791856390
DOIs	https://doi.org/10.1115/IMECE2013-66010
Publication status	Published - 2 Apr 2014
Event	ASME 2013 International Mechanical Engineering Congress and Exposition, IMECE 2013 - San Diego, CA, USA United States Duration: 15 Nov 2013 → 21 Nov 2013

Publication series

Name	ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume	10

Conference

Conference	ASME 2013 International Mechanical Engineering Congress and Exposition, IMECE 2013
Country/Territory	USA United States
City	San Diego, CA
Period	15/11/13 → 21/11/13

Keywords

Contactless suspension
Levitation
Micromachined inertial sensors

ASJC Scopus subject areas

Mechanical Engineering

Access to Document

10.1115/IMECE2013-66010

Cite this

Poletkin, K. V., Chernomorsky, A. I., Shearwood, C., & Wallrabe, U. (2014). An analytical model of micromachined electromagnetic inductive contactless suspension. In ASME 2013 International Mechanical Engineering Congress and Exposition (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); Vol. 10). The American Society of Mechanical Engineers(ASME). https://doi.org/10.1115/IMECE2013-66010

An analytical model of micromachined electromagnetic inductive contactless suspension. / Poletkin, Kirill V.; Chernomorsky, Alexsandr I.; Shearwood, Christopher et al.
ASME 2013 International Mechanical Engineering Congress and Exposition. U. S. A.: The American Society of Mechanical Engineers(ASME), 2014. (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); Vol. 10).

Research output: Chapter or section in a book/report/conference proceeding › Chapter in a published conference proceeding

Poletkin, KV, Chernomorsky, AI, Shearwood, C & Wallrabe, U 2014, An analytical model of micromachined electromagnetic inductive contactless suspension. in ASME 2013 International Mechanical Engineering Congress and Exposition. ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE), vol. 10, The American Society of Mechanical Engineers(ASME), U. S. A., ASME 2013 International Mechanical Engineering Congress and Exposition, IMECE 2013, San Diego, CA, USA United States, 15/11/13. https://doi.org/10.1115/IMECE2013-66010

Poletkin KV, Chernomorsky AI, Shearwood C, Wallrabe U. An analytical model of micromachined electromagnetic inductive contactless suspension. In ASME 2013 International Mechanical Engineering Congress and Exposition. U. S. A.: The American Society of Mechanical Engineers(ASME). 2014. (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)). doi: 10.1115/IMECE2013-66010

Poletkin, Kirill V. ; Chernomorsky, Alexsandr I. ; Shearwood, Christopher et al. / An analytical model of micromachined electromagnetic inductive contactless suspension. ASME 2013 International Mechanical Engineering Congress and Exposition. U. S. A. : The American Society of Mechanical Engineers(ASME), 2014. (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)).

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An analytical model of micromachined electromagnetic inductive contactless suspension

Abstract

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