AlN overgrowth of nano-pillar-patterned sapphire with different offcut angle by metalorganic vapor phase epitaxy

S. Walde, S. Hagedorn, P.-m. Coulon, A. Mogilatenko, C. Netzel, J. Weinrich, N. Susilo, E. Ziffer, L. Matiwe, C. Hartmann, Gunnar Kusch, A. Alasmari, G. Naresh-kumar, C. Trager-cowan, T. Wernicke, T. Straubinger, M. Bickermann, Robert W. Martin, P.a. Shields, M. KneisslM. Weyers

Research output: Contribution to journal › Article › peer-review

14 Citations (SciVal)

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Finished
Manufacturing of Nano-Engineered III-N Semiconductors
Shields, P. (PI), Allsopp, D. (CoI) & Wang, W. (CoI)
Engineering and Physical Sciences Research Council
1/05/15 → 30/09/21
Project: Research council
Manufacturing of Nano-Engineered III-N Semiconductors - Equipment
Shields, P. (PI) & Allsopp, D. (CoI)
Engineering and Physical Sciences Research Council
1/02/15 → 31/01/20
Project: Research council