Abstract

In this study, a detailed analysis of the direct piezo-response of AlN nanowire-based vertically integrated nanogenerators (VINGs) is undertaken as a function of mechanical excitation frequency. We show that the piezo-charge, piezo-voltage, and impedance measured at the same position of the devices can be directly correlated through an equivalent circuit model in the whole frequency range of investigation. Our presented results are utilized to determine the performance figures of merit (FoM) of nanowire-based VINGs, namely, the piezoelectric voltage constant (g) for sensing and the product d · g for energy harvesting, where d is the piezoelectric charge constant. By comparison of these metrics with those of freestanding single-crystal GaN and quartz substrates as well as sputtered AlN thin films, we suggest that the nanowires can outperform their rigid counterparts in terms of mechanical sensing and energy generation. This work provides experimental guidelines for understanding the direct piezo-characteristics of VINGs and facilitates a quantitative comparison between nanostructured piezoelectric devices fabricated by using different materials or architectures.

Original languageEnglish
Pages (from-to)15798-15807
Number of pages10
JournalACS Applied Nano Materials
Volume7
Issue number13
Early online date27 Jun 2024
DOIs
Publication statusPublished - 12 Jul 2024

Funding

We acknowledge the assistance from Nanofab/Ne\u0301el Institute for sample fabrications and from SERAS/Ne\u0301el Institute for the setup development. The work was financially supported by ANR-15-IDEX-02, ANR-PRCI NanoFlex (Project No. ANR-21-CE09-0044), and German Bundesministerium fu\u0308r Bildung und Forschung (Project No. FKZ:13N13662).

FundersFunder number
ANR-PRCI NanoFlexANR-21-CE09-0044
Bundesministerium für Bildung und Forschung13N13662

    Keywords

    • AlN nanowires
    • energy harvesters
    • figure of merit
    • III−N semiconductors
    • nanogenerators
    • piezoelectricity

    ASJC Scopus subject areas

    • General Materials Science

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