Abstract
All-chemical vapor deposited silicon nitride / monolayer graphene TFTs have been fabricated. Polychromatic Raman spectroscopy shows high quality monolayer graphene channels with uniform coverage and significant interfacial doping at the source-drain contacts. Nominal mobilities of approximately 1900 cm 2V-1s-1 have been measured opening up a potentially useful platform for analogue and RFR-based applications fabricated through allchemical vapor deposition processes.
Original language | English |
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Title of host publication | Thin Film Transistors 11, TFT 2012, (8th ed ) |
Pages | 217-221 |
Number of pages | 5 |
Volume | 50 |
DOIs | |
Publication status | Published - 2012 |
Event | 11th Symposium on Thin Film Transistor Technologies, TFT 2012 - PRiME 2012 - Honolulu, HI, USA United States Duration: 8 Oct 2012 → 10 Oct 2012 |
Conference
Conference | 11th Symposium on Thin Film Transistor Technologies, TFT 2012 - PRiME 2012 |
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Country/Territory | USA United States |
City | Honolulu, HI |
Period | 8/10/12 → 10/10/12 |
ASJC Scopus subject areas
- Engineering(all)