AFM tip-based nanomachining with increased cutting speed at the tool-workpiece interface

Yanquan Geng, Emmanuel B. Brousseau, Xuesen Zhao, Micheal Gensheimer, Christopher R. Bowen

Research output: Contribution to journalArticle

Abstract

This paper reports a study towards enhancing the throughput of the Atomic Force Microscope (AFM) tip-based nanomachining process by increasing the cutting speed at the interface between the tool and the workpiece. A modified AFM set-up was implemented, which combined the fast reciprocating motions of a piezoelectric actuator, on which the workpiece was mounted, and the linear displacement of the AFM stage, which defined the length of produced grooves. The influence of the feed, the feed direction and the cutting speed on the machined depth and on the chip formation was studied in detail when machining poly(methyl methacrylate). A theoretical cutting speed over 5 m/min could be achieved with this set-up when the frequency of the piezoelectric actuator reciprocating motions was 40 kHz. This is significantly better than the state of the art for AFM-based nanomachining, which is currently less than 1 m/min.

LanguageEnglish
Pages536-544
Number of pages9
JournalPrecision Engineering
Volume51
Early online date17 Oct 2017
DOIs
StatusPublished - 1 Jan 2018

Fingerprint

Microscopes
Piezoelectric actuators
Polymethyl methacrylates
Machining
Throughput

Keywords

  • Atomic force microscopy
  • Piezoelectric actuation
  • Tip-based nanomachining

ASJC Scopus subject areas

  • Engineering(all)

Cite this

AFM tip-based nanomachining with increased cutting speed at the tool-workpiece interface. / Geng, Yanquan; Brousseau, Emmanuel B.; Zhao, Xuesen; Gensheimer, Micheal; Bowen, Christopher R.

In: Precision Engineering, Vol. 51, 01.01.2018, p. 536-544.

Research output: Contribution to journalArticle

Geng, Yanquan ; Brousseau, Emmanuel B. ; Zhao, Xuesen ; Gensheimer, Micheal ; Bowen, Christopher R. / AFM tip-based nanomachining with increased cutting speed at the tool-workpiece interface. In: Precision Engineering. 2018 ; Vol. 51. pp. 536-544.
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