TY - JOUR
T1 - Aerosol-assisted CVD of antimony sulfide from antimony dithiocarbamates
AU - Rodriguez-Castro, J
AU - Mahon, M F
AU - Molloy, K C
N1 - ID number: ISI:000241774400004
PY - 2006
Y1 - 2006
N2 - Asymmetric antimony dithiocarbamates, Sb[S2CN(Me)R](3) (R =Bu, Hex, Bz), can be thermally decomposed under a dynamic vacuum to yield high-purity Sb2S3 rods. These precursors do not, however, have sufficient volatility for low-pressure (LP) CVD, but are soluble in organic solvents and can be exploited in aerosol-assisted (AA) CVD. Sb2S3 can be deposited using the latter procedure, but the film purity is dependent on substrate temperature. As temperature increases the films become more susceptible to oxidation, and the deposition of oxides and mixed oxide/sulfides becomes more prevalent.
AB - Asymmetric antimony dithiocarbamates, Sb[S2CN(Me)R](3) (R =Bu, Hex, Bz), can be thermally decomposed under a dynamic vacuum to yield high-purity Sb2S3 rods. These precursors do not, however, have sufficient volatility for low-pressure (LP) CVD, but are soluble in organic solvents and can be exploited in aerosol-assisted (AA) CVD. Sb2S3 can be deposited using the latter procedure, but the film purity is dependent on substrate temperature. As temperature increases the films become more susceptible to oxidation, and the deposition of oxides and mixed oxide/sulfides becomes more prevalent.
U2 - 10.1002/cvde.200506369
DO - 10.1002/cvde.200506369
M3 - Article
SN - 0948-1907
VL - 12
SP - 601
EP - 607
JO - Chemical Vapor Deposition
JF - Chemical Vapor Deposition
IS - 10
ER -