Advances in electron channelling contrast imaging and electron backscatter diffraction for imaging and analysis of structural defects in the scanning electron microscope

C. Trager-Cowan; A. Alasmari; W. Avis; J. Bruckbauer; P. R. Edwards; B. Hourahine; S. Kraeusel; G. Kusch; B. M. Jablon; R. Johnston; R. W. Martin; R. McDermott; G. Naresh-Kumar; M. Nouf-Allehiani; E. Pascal; D. Thomson; S. Vespucci; K. Mingard; P. J. Parbrook; M. D. Smith; J. Enslin; F. Mehnke; M. Kneissl; C. Kuhn; T. Wernicke; A. Knauer; S. Hagedorn; S. Walde; M. Weyers; P. M. Coulon; P. A. Shields; Y. Zhang; L. Jiu; Y. Gong; R. M. Smith; T. Wang; A. Winkelmann

doi:10.1088/1757-899X/891/1/012023

Advances in electron channelling contrast imaging and electron backscatter diffraction for imaging and analysis of structural defects in the scanning electron microscope

C. Trager-Cowan, A. Alasmari, W. Avis, J. Bruckbauer, P. R. Edwards, B. Hourahine, S. Kraeusel, G. Kusch, B. M. Jablon, R. Johnston, R. W. Martin, R. McDermott, G. Naresh-Kumar, M. Nouf-Allehiani, E. Pascal, D. Thomson, S. Vespucci, K. Mingard, P. J. Parbrook, M. D. SmithJ. Enslin, F. Mehnke, M. Kneissl, C. Kuhn, T. Wernicke, A. Knauer, S. Hagedorn, S. Walde, M. Weyers, P. M. Coulon, P. A. Shields, Y. Zhang, L. Jiu, Y. Gong, R. M. Smith, T. Wang, A. Winkelmann

Research output: Contribution to journal › Conference article › peer-review

Abstract

In this article we describe the scanning electron microscopy (SEM) techniques of electron channelling contrast imaging and electron backscatter diffraction. These techniques provide information on crystal structure, crystal misorientation, grain boundaries, strain and structural defects on length scales from tens of nanometres to tens of micrometres. Here we report on the imaging and analysis of dislocations and sub-grains in nitride semiconductor thin films (GaN and AlN) and tungsten carbide-cobalt (WC-Co) hard metals. Our aim is to illustrate the capability of these techniques for investigating structural defects in the SEM and the benefits of combining these diffraction-based imaging techniques.

Original language	English
Article number	012023
Journal	IOP Conference Series: Materials Science and Engineering
Volume	891
Issue number	1
DOIs	https://doi.org/10.1088/1757-899X/891/1/012023
Publication status	Published - 5 Aug 2020
Event	16th European Workshop on Modern Developments and Applications in Microbeam Analysis, EMAS 2019 - Trondheim, Norway Duration: 19 May 2019 → 23 May 2019

ASJC Scopus subject areas

General Materials Science
General Engineering

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10.1088/1757-899X/891/1/012023Licence: CC BY

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Trager-Cowan, C., Alasmari, A., Avis, W., Bruckbauer, J., Edwards, P. R., Hourahine, B., Kraeusel, S., Kusch, G., Jablon, B. M., Johnston, R., Martin, R. W., McDermott, R., Naresh-Kumar, G., Nouf-Allehiani, M., Pascal, E., Thomson, D., Vespucci, S., Mingard, K., Parbrook, P. J., ... Winkelmann, A. (2020). Advances in electron channelling contrast imaging and electron backscatter diffraction for imaging and analysis of structural defects in the scanning electron microscope. IOP Conference Series: Materials Science and Engineering, 891(1), Article 012023. https://doi.org/10.1088/1757-899X/891/1/012023

Advances in electron channelling contrast imaging and electron backscatter diffraction for imaging and analysis of structural defects in the scanning electron microscope. / Trager-Cowan, C.; Alasmari, A.; Avis, W. et al.
In: IOP Conference Series: Materials Science and Engineering, Vol. 891, No. 1, 012023, 05.08.2020.

Research output: Contribution to journal › Conference article › peer-review

Trager-Cowan, C, Alasmari, A, Avis, W, Bruckbauer, J, Edwards, PR, Hourahine, B, Kraeusel, S, Kusch, G, Jablon, BM, Johnston, R, Martin, RW, McDermott, R, Naresh-Kumar, G, Nouf-Allehiani, M, Pascal, E, Thomson, D, Vespucci, S, Mingard, K, Parbrook, PJ, Smith, MD, Enslin, J, Mehnke, F, Kneissl, M, Kuhn, C, Wernicke, T, Knauer, A, Hagedorn, S, Walde, S, Weyers, M, Coulon, PM, Shields, PA, Zhang, Y, Jiu, L, Gong, Y, Smith, RM, Wang, T & Winkelmann, A 2020, 'Advances in electron channelling contrast imaging and electron backscatter diffraction for imaging and analysis of structural defects in the scanning electron microscope', IOP Conference Series: Materials Science and Engineering, vol. 891, no. 1, 012023. https://doi.org/10.1088/1757-899X/891/1/012023

Trager-Cowan C, Alasmari A, Avis W, Bruckbauer J, Edwards PR, Hourahine B et al. Advances in electron channelling contrast imaging and electron backscatter diffraction for imaging and analysis of structural defects in the scanning electron microscope. IOP Conference Series: Materials Science and Engineering. 2020 Aug 5;891(1):012023. doi: 10.1088/1757-899X/891/1/012023

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abstract = "In this article we describe the scanning electron microscopy (SEM) techniques of electron channelling contrast imaging and electron backscatter diffraction. These techniques provide information on crystal structure, crystal misorientation, grain boundaries, strain and structural defects on length scales from tens of nanometres to tens of micrometres. Here we report on the imaging and analysis of dislocations and sub-grains in nitride semiconductor thin films (GaN and AlN) and tungsten carbide-cobalt (WC-Co) hard metals. Our aim is to illustrate the capability of these techniques for investigating structural defects in the SEM and the benefits of combining these diffraction-based imaging techniques.",

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AU - Avis, W.

AU - Bruckbauer, J.

AU - Edwards, P. R.

AU - Hourahine, B.

AU - Kraeusel, S.

AU - Kusch, G.

AU - Jablon, B. M.

AU - Johnston, R.

AU - Martin, R. W.

AU - McDermott, R.

AU - Naresh-Kumar, G.

AU - Nouf-Allehiani, M.

AU - Pascal, E.

AU - Thomson, D.

AU - Vespucci, S.

AU - Mingard, K.

AU - Parbrook, P. J.

AU - Smith, M. D.

AU - Enslin, J.

AU - Mehnke, F.

AU - Kneissl, M.

AU - Kuhn, C.

AU - Wernicke, T.

AU - Knauer, A.

AU - Hagedorn, S.

AU - Walde, S.

AU - Weyers, M.

AU - Coulon, P. M.

AU - Shields, P. A.

AU - Zhang, Y.

AU - Jiu, L.

AU - Gong, Y.

AU - Smith, R. M.

AU - Wang, T.

AU - Winkelmann, A.

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Advances in electron channelling contrast imaging and electron backscatter diffraction for imaging and analysis of structural defects in the scanning electron microscope

Abstract

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Manufacturing of Nano-Engineered III-N Semiconductors

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Advances in electron channelling contrast imaging and electron backscatter diffraction for imaging and analysis of structural defects in the scanning electron microscope

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

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Projects

Manufacturing of Nano-Engineered III-N Semiconductors

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