Activation energies for vacancy migration, clustering and annealing in silicon

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Abstract

A series of measurements have been performed at the University of Bath to study the evolution of vacancy-type structures in silicon. Isothermal annealing performed during positron beam-based Doppler broadening measurements have yielded activation energies for vacancy cluster formation and evaporation in silicon of approximately 2.5 and 3.7 eV, respectively. The clusters, which could predominantly be the stable hexavacancy, appear to form between 400-500C, and anneal at 600C. A similar technique applied to low-temperature in situ measurements have yielded the migration energies for the silicon monovacancy and interstitial (of 0.5 and 0.08 eV, respectively). Interesting observations of positronium formation at the surface of the samples studied during isothermal annealing are presented.
Original languageEnglish
Article number012001
Number of pages12
JournalJournal of Physics: Conference Series
Volume265
Issue number1
DOIs
Publication statusPublished - 2011
Event6th International Workshop on Positron Studies of Defects, PSD 08, September 1, 2008 - September 5, 2008 - Prague, Czech Republic
Duration: 1 Jan 2011 → …

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activation energy
annealing
silicon
positronium
in situ measurement
baths
positrons
interstitials
evaporation
energy

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Activation energies for vacancy migration, clustering and annealing in silicon. / Coleman, Paul G.

In: Journal of Physics: Conference Series, Vol. 265, No. 1, 012001, 2011.

Research output: Contribution to journalArticle

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