AACVD of WO3 thin films from W(O)(OPri)(3)[O(CH2)(n)NMe2] (n=2, 3)

K C Molloy, P A Williams

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13 Citations (SciVal)


Monomeric tungsten oxo-aminoalkoxides W(O)(OPri)(3)(L)[L = O(CH2)(n)NMe2; n = 2 (dmae, 1) and 3 (dmap, 2)] were synthesized by alcohol exchange with [W(O)(OPri)(4)](2) and characterized spectroscopically. 1, 2 and [W(O)(OPri)(4)](2) were used as precursors for the aerosol-assisted chemical vapour deposition Of WO3 thin films, which were characterized by glancing angle X-ray diffraction, SEM and transmission-reflectance measurements.
Original languageEnglish
Pages (from-to)676-683
Number of pages8
JournalApplied Organometallic Chemistry
Issue number12
Publication statusPublished - 2008


  • single-source precursor
  • thin film
  • tungsten oxide
  • alkoxide
  • CVD


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