AACVD of WO3 thin films from W(O)(OPri)(3)[O(CH2)(n)NMe2] (n=2, 3)

K C Molloy; P A Williams

doi:10.1002/aoc.1458

AACVD of WO3 thin films from W(O)(OPri)(3)[O(CH2)(n)NMe2] (n=2, 3)

K C Molloy, P A Williams

Department of Chemistry

Research output: Contribution to journal › Article › peer-review

13 Citations (SciVal)

Abstract

Monomeric tungsten oxo-aminoalkoxides W(O)(OPri)(3)(L)[L = O(CH2)(n)NMe2; n = 2 (dmae, 1) and 3 (dmap, 2)] were synthesized by alcohol exchange with [W(O)(OPri)(4)](2) and characterized spectroscopically. 1, 2 and [W(O)(OPri)(4)](2) were used as precursors for the aerosol-assisted chemical vapour deposition Of WO3 thin films, which were characterized by glancing angle X-ray diffraction, SEM and transmission-reflectance measurements.

Original language	English
Pages (from-to)	676-683
Number of pages	8
Journal	Applied Organometallic Chemistry
Volume	22
Issue number	12
DOIs	https://doi.org/10.1002/aoc.1458
Publication status	Published - 2008

Keywords

single-source precursor
thin film
tungsten oxide
alkoxide
CVD

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10.1002/aoc.1458

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title = "AACVD of WO3 thin films from W(O)(OPri)(3)[O(CH2)(n)NMe2] (n=2, 3)",

abstract = "Monomeric tungsten oxo-aminoalkoxides W(O)(OPri)(3)(L)[L = O(CH2)(n)NMe2; n = 2 (dmae, 1) and 3 (dmap, 2)] were synthesized by alcohol exchange with [W(O)(OPri)(4)](2) and characterized spectroscopically. 1, 2 and [W(O)(OPri)(4)](2) were used as precursors for the aerosol-assisted chemical vapour deposition Of WO3 thin films, which were characterized by glancing angle X-ray diffraction, SEM and transmission-reflectance measurements.",

keywords = "single-source precursor, thin film, tungsten oxide, alkoxide, CVD",

author = "Molloy, {K C} and Williams, {P A}",

year = "2008",

doi = "10.1002/aoc.1458",

language = "English",

volume = "22",

pages = "676--683",

journal = "Applied Organometallic Chemistry",

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AU - Molloy, K C

AU - Williams, P A

PY - 2008

Y1 - 2008

N2 - Monomeric tungsten oxo-aminoalkoxides W(O)(OPri)(3)(L)[L = O(CH2)(n)NMe2; n = 2 (dmae, 1) and 3 (dmap, 2)] were synthesized by alcohol exchange with [W(O)(OPri)(4)](2) and characterized spectroscopically. 1, 2 and [W(O)(OPri)(4)](2) were used as precursors for the aerosol-assisted chemical vapour deposition Of WO3 thin films, which were characterized by glancing angle X-ray diffraction, SEM and transmission-reflectance measurements.

AB - Monomeric tungsten oxo-aminoalkoxides W(O)(OPri)(3)(L)[L = O(CH2)(n)NMe2; n = 2 (dmae, 1) and 3 (dmap, 2)] were synthesized by alcohol exchange with [W(O)(OPri)(4)](2) and characterized spectroscopically. 1, 2 and [W(O)(OPri)(4)](2) were used as precursors for the aerosol-assisted chemical vapour deposition Of WO3 thin films, which were characterized by glancing angle X-ray diffraction, SEM and transmission-reflectance measurements.

KW - single-source precursor

KW - thin film

KW - tungsten oxide

KW - alkoxide

KW - CVD

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UR - http://dx.doi.org/10.1002/aoc.1458

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DO - 10.1002/aoc.1458

M3 - Article

SN - 0268-2605

VL - 22

SP - 676

EP - 683

JO - Applied Organometallic Chemistry

JF - Applied Organometallic Chemistry

IS - 12

ER -

AACVD of WO3 thin films from W(O)(OPri)(3)[O(CH2)(n)NMe2] (n=2, 3)

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Keywords

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