A quartz crystal microbalance apparatus for studying interactions of solvents with thin polymer films

Gareth J. Price, Jill M. Buley

Research output: Contribution to journalArticle

Abstract

This paper describes an apparatus developed for studying the effects of solvents on thin polymer films using a quartz crystal microbalance. It is shown that both swelling and dissolution processes can be monitored over a wide range of systems. The main application was in the investigation of photoresist development and it is demonstrated that all the appropriate parameters - solvent composition, temperature, polymer molecular weight and radiation dose - on film dissolution are amenable to study in a convenient and economic manner.

Original languageEnglish
Pages (from-to)265-274
Number of pages10
JournalProgress in Organic Coatings
Volume19
Issue number3
DOIs
Publication statusPublished - 16 Sep 1991

ASJC Scopus subject areas

  • Chemical Engineering(all)
  • Surfaces, Coatings and Films
  • Organic Chemistry
  • Materials Chemistry

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