Abstract
This paper describes an apparatus developed for studying the effects of solvents on thin polymer films using a quartz crystal microbalance. It is shown that both swelling and dissolution processes can be monitored over a wide range of systems. The main application was in the investigation of photoresist development and it is demonstrated that all the appropriate parameters - solvent composition, temperature, polymer molecular weight and radiation dose - on film dissolution are amenable to study in a convenient and economic manner.
| Original language | English |
|---|---|
| Pages (from-to) | 265-274 |
| Number of pages | 10 |
| Journal | Progress in Organic Coatings |
| Volume | 19 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 16 Sept 1991 |
ASJC Scopus subject areas
- General Chemical Engineering
- Surfaces, Coatings and Films
- Organic Chemistry
- Materials Chemistry