A new tool for nondestructive monitoring of ion implantation

Paul Coleman; C P Burrows; A P Knights; R M Gwilliam; B J Sealy; R D Goldberg; A Al-Bayati; M Foad; A Murrell

doi:10.1109/.2000.924238

A new tool for nondestructive monitoring of ion implantation

Paul Coleman, C P Burrows, A P Knights, R M Gwilliam, B J Sealy, R D Goldberg, A Al-Bayati, M Foad, A Murrell

Department of Physics

Research output: Contribution to conference › Paper › peer-review

3 Citations (SciVal)

Original language	English
Pages	654-657
Number of pages	4
DOIs	https://doi.org/10.1109/.2000.924238
Publication status	Published - 2000
Event	Conference on Ion Implantation Technology, 2000 - Duration: 22 Sept 2000 → …

Conference

Conference	Conference on Ion Implantation Technology, 2000
Period	22/09/00 → …

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10.1109/.2000.924238

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title = "A new tool for nondestructive monitoring of ion implantation",

author = "Paul Coleman and Burrows, {C P} and Knights, {A P} and Gwilliam, {R M} and Sealy, {B J} and Goldberg, {R D} and A Al-Bayati and M Foad and A Murrell",

year = "2000",

doi = "10.1109/.2000.924238",

language = "English",

pages = "654--657",

note = "Conference on Ion Implantation Technology, 2000 ; Conference date: 22-09-2000",

}

TY - CONF

T1 - A new tool for nondestructive monitoring of ion implantation

AU - Coleman, Paul

AU - Burrows, C P

AU - Knights, A P

AU - Gwilliam, R M

AU - Sealy, B J

AU - Goldberg, R D

AU - Al-Bayati, A

AU - Foad, M

AU - Murrell, A

PY - 2000

Y1 - 2000

UR - http://dx.doi.org/10.1109/.2000.924238

U2 - 10.1109/.2000.924238

DO - 10.1109/.2000.924238

M3 - Paper

SP - 654

EP - 657

T2 - Conference on Ion Implantation Technology, 2000

Y2 - 22 September 2000

ER -

A new tool for nondestructive monitoring of ion implantation

Conference

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