Abstract
We report the design of a two-degree-of-freedom microelectromechanical systems nanopositioner for on-chip atomic force microscopy (AFM). The device is fabricated using a silicon-on-insulator-based process to function as the scanning stage of a miniaturized AFM. It is a highly resonant system with its lateral resonance frequency at ~850 Hz. The incorporated electrostatic actuators achieve a travel range of 16 ~{&L̃}m in each direction. Lateral displacements of the scan table are measured using a pair of electrothermal position sensors. These sensors are used, together with a positive position feedback controller, in a feedback loop, to damp the highly resonant dynamics of the stage. The feedback controlled nanopositioner is used, successfully, to generate high-quality AFM images at scan rates as fast as 100 Hz.
Original language | English |
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Article number | 6678523 |
Pages (from-to) | 610-619 |
Number of pages | 10 |
Journal | IEEE/ASME Journal of Microelectromechancial Systems |
Volume | 23 |
Issue number | 3 |
Early online date | 5 Dec 2013 |
DOIs | |
Publication status | Published - 30 Jun 2014 |
Keywords
- AFM.
- Electrothermal sensor
- MEMS
- Nanopositioning
- On-chip
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering
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Ali Mohammadi
- Department of Electronic & Electrical Engineering - Senior Lecturer
- Electronics Materials, Circuits & Systems Research Unit (EMaCS)
- Centre for Digital, Manufacturing & Design (dMaDe)
- Centre for Bioengineering & Biomedical Technologies (CBio)
- Bath Institute for the Augmented Human
Person: Research & Teaching, Core staff, Affiliate staff