A 64×64 GaN Micro LED monolithic display array fabrication and light cross talk analysis

Xiao Yang; Yuan  Meng; Xiaoyu  Feng; Longzhen He; Philip Shields; Sean Lee; Yanqin Wang; Zhifang Wang; Pingfan  Ning; Hongwei Liu

doi:10.3390/mi16020207

A 64×64 GaN Micro LED monolithic display array fabrication and light cross talk analysis

Xiao Yang, Yuan Meng, Xiaoyu Feng, Longzhen He, Philip Shields, Sean Lee, Yanqin Wang, Zhifang Wang, Pingfan Ning, Hongwei Liu

Research output: Contribution to journal › Article › peer-review

Abstract

Monolithic micro LED display arrays show potential for application in small-area display modules, such as augmented reality (AR) displays. Due to the short distance between micro LEDs and the monolithic transparent substrate, a light crosstalk phenomenon exists between adjacent micro LED pixels, decreasing the array’s display definition. In this paper, a 64 × 64 GaN micro LED monolithic display array was fabricated on a silicon-based drive circuit. The micro LED size was 20 μm × 20 μm, and the pitch between micro LEDs was 28 μm. To suppress the optical crosstalk between adjacent micro LEDs in the array, we etched a photonic crystal structure using a focused ion beam (FIB) on the micro LED sapphire substrate. Measurements of the micro LED nearfield electroluminescence (EL) and finite element method (FEM) calculations demonstrated that the light expansion was confined in the photonic crystal micro LED with a thinner substrate. The presented work provides references regarding the fabrication of monolithic micro LED arrays and the control of crosstalk in displays.

Original language	English
Article number	207
Journal	Micromachines
Volume	16
Issue number	2
Early online date	11 Feb 2025
DOIs	https://doi.org/10.3390/mi16020207
Publication status	Published - 28 Feb 2025

Data Availability Statement

The original contributions presented in this study are included in the article. Further inquiries can be directed to the corresponding author(s).

Acknowledgements

The authors would like to thank the Analytical &Testing Center of Tiangong
University and Sanan Optoelectronics Co., Ltd. for technical support.

Funding

Hongwei Liu reports financial support was provided by Tianjin Municipal Science and Technology Bureau, China Scholarship Council (CSC) and Tianjin Key Laboratory of Optoelectronic Detection Technology and System. This research was funded by the Tianjin Municipal Science and Technology Bureau, Grant 23YDTPJC00370; in part by the China Scholarship Council (CSC), Grant 201809345004; and in part by the Tianjin Key Laboratory of Optoelectronic Detection Technology and System under Grant 2023LOTDS003.

Keywords

focused ion beam (FIB)
micro light-emitting diode (LED)
monolithic display array
optical crosstalk
photonic crystal

ASJC Scopus subject areas

Control and Systems Engineering
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.3390/mi16020207Licence: CC BY

https://www.mdpi.com/2072-666X/16/2/207Licence: CC BY

Cite this

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title = "A 64×64 GaN Micro LED monolithic display array fabrication and light cross talk analysis",

abstract = "Monolithic micro LED display arrays show potential for application in small-area display modules, such as augmented reality (AR) displays. Due to the short distance between micro LEDs and the monolithic transparent substrate, a light crosstalk phenomenon exists between adjacent micro LED pixels, decreasing the array{\textquoteright}s display definition. In this paper, a 64 × 64 GaN micro LED monolithic display array was fabricated on a silicon-based drive circuit. The micro LED size was 20 μm × 20 μm, and the pitch between micro LEDs was 28 μm. To suppress the optical crosstalk between adjacent micro LEDs in the array, we etched a photonic crystal structure using a focused ion beam (FIB) on the micro LED sapphire substrate. Measurements of the micro LED nearfield electroluminescence (EL) and finite element method (FEM) calculations demonstrated that the light expansion was confined in the photonic crystal micro LED with a thinner substrate. The presented work provides references regarding the fabrication of monolithic micro LED arrays and the control of crosstalk in displays.",

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AU - Lee, Sean

AU - Wang, Yanqin

AU - Wang, Zhifang

AU - Ning, Pingfan

AU - Liu, Hongwei

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A 64×64 GaN Micro LED monolithic display array fabrication and light cross talk analysis

Abstract

Data Availability Statement

Acknowledgements

Funding

Keywords

ASJC Scopus subject areas

Access to Document

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