Mohammadi, A.,
Sadrafshari, S.,
Shokrani, A. &
Bowen, C.,
30 Jan 2023, (E-pub ahead of print)
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE,
p. 697-700 4 p. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); vol. 2023-January).
Research output: Chapter or section in a book/report/conference proceeding › Chapter in a published conference proceeding