Veeco 6M Dektak Surface Profiler

    Facility/equipment: Equipment

    • LocationShow on map

      NANOFAB LAB University of Bath Claverton Down Bath BA2 7AY

      UK United Kingdom

    Equipments Details

    Description

    2-D step height measurement tool with capability of 10 nm accuracy.

    Details

    NameMake: Veeco; Model: Dektak 6M
    Acquisition date31/07/03

    Equipment taxonomy

    • Profilometry

    User-defined keywords

    • Surface Profiling