Research output per year
Research output per year
Equipments Details
Description
Electron Beam Lithography System: Accelerating voltages 0.5 - 30 kV. 50 by 50 mm laser interferometric stage capable of writing over 50 mm wafers with < 80 nm accuracy. Capable of 20 nm line width.
Details
| Name | Make: Hitachi; Model: S 4300 |
|---|---|
| Acquisition date | 6/02/01 |
Equipment taxonomy
- Electron Beam
User-defined keywords
- Electron Beam Lithography
Fingerprint
Explore the research areas in which this equipment has been used. These labels are generated based on the related outputs. Together they form a unique fingerprint.
Research output
- 14 Article
-
Creation of regular arrays of faceted AlN nanostructures via a combined top-down, bottom-up approach
Armstrong, R., Coulon, P. M., Bozinakis, P., Martin, R. W. & Shields, P. A., 15 Oct 2020, In: Journal of Crystal Growth. 548, 125824.Research output: Contribution to journal › Article › peer-review
Open AccessFile5 Citations (SciVal)229 Downloads (Pure) -
Influence of the reactor environment on the selective area thermal etching of GaN nanohole arrays
Coulon, P. M., Feng, P., Damilano, B., Vézian, S., Wang, T. & Shields, P. A., 27 Mar 2020, In: Scientific Reports. 10, 1, 5642.Research output: Contribution to journal › Article › peer-review
Open Access7 Citations (SciVal) -
Displacement Talbot Lithography for nano-engineering of III-nitride materials
Coulon, P.-M., Damilano, B., Alloing, B., Chausse, P., Walde, S., Enslin, J., Armstrong, R., Vézian, S., Hagedorn, S., Wernicke, T., Massies, J., Zúñiga-Pérez, J., Weyers, M., Kneissl, M. & Shields, P., 2 Dec 2019, In: Microsystems & Nanoengineering. 5, 1, 52.Research output: Contribution to journal › Article › peer-review
Open Access39 Citations (SciVal) -
Nanoscale graphene Hall sensors for high-resolution ambient magnetic imaging
Collomb, D., Li, P. & Bending, S. J., 8 Oct 2019, In: Scientific Reports. 9, 1, p. 14424 10 p., 14424 (2019).Research output: Contribution to journal › Article › peer-review
Open Access21 Citations (SciVal) -
Deep UV Emission from Highly Ordered AlGaN/AlN Core–Shell Nanorods
Coulon, P.-M., Kusch, G., Martin, R. W. & Shields, P. A., 3 Oct 2018, In: ACS Applied Materials and Interfaces. 10, 39, p. 33441-33449 9 p.Research output: Contribution to journal › Article › peer-review
Open AccessFile30 Citations (SciVal)111 Downloads (Pure)