Plasmapro System 100 Cobra

Facility/equipment: Equipment

  • LocationShow on map

    3 W ANNEX 2.5 Dept of Electronic and Electrical Engineering University of Bath Claverton Down Bath BA2 7AY

    UK United Kingdom

Equipments Details


ICP etching system: it utilises a high-density inductively coupled plasma to achieve fast etch rates.


NameMake: ADIXEN; Model: ADP122P
Acquisition date3/02/12

Equipment taxonomy

  • Plasma


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