Plasma Therm 790 series PECVD

    Department of Physics

    Facility/equipment: Equipment

      Description

      Plasma enhanced chemical vapour deposition of various inorganic thin films e.g. SiO2

      Contact information

      Phone01225 386956
      Emailsnanofab@bath.ac.uk
      LinksWebsite

      Terms of loan/booking

      Available for loan - internal and external

      Contact Stephen Wedge for details of costs.