Equipments Details
Description
Plasma enhanced chemical vapour deposition of various inorganic thin films e.g. SiO2, SiNx.
Details
| Name | Make: Plasma Therm; Model: 790 |
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Equipment taxonomy
- Chemical Vapour Deposition
User-defined keywords
- PECVD
Fingerprint
Explore the research areas in which this equipment has been used. These labels are generated based on the related outputs. Together they form a unique fingerprint.
Research output
- 1 Article
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Fabrication of a Horizontal and a Vertical Large Surface Area Nanogap Electrochemical Sensor
Hammond, J., Rosamond, M. C., Sivaraya, S., Marken, F. & Estrela, P., 14 Dec 2016, In: Sensors. 16, 12, 16 p., 2128.Research output: Contribution to journal › Article › peer-review
Open AccessFile8 Link opens in a new tab Citations (SciVal)319 Downloads (Pure)