Plasma Therm 790 PECVD

Facility/equipment: Equipment

LocationShow on map
NANOFAB LAB University of Bath Claverton Down Bath BA2 7AY
UK United Kingdom

Description

Plasma enhanced chemical vapour deposition of various inorganic thin films e.g. SiO2, SiNx.

Details

Name	Make: Plasma Therm; Model: 790

Equipment taxonomy

Chemical Vapour Deposition

User-defined keywords

PECVD

Contact information

Emails	[email protected]
Links	Website

Equipment hierarchy

David Bullett Nanofabrication Facility

Plasma Therm 790 PECVD

1 Article

Fabrication of a Horizontal and a Vertical Large Surface Area Nanogap Electrochemical Sensor
Hammond, J., Rosamond, M. C., Sivaraya, S., Marken, F. & Estrela, P., 14 Dec 2016, In: Sensors. 16, 12, 16 p., 2128.
Research output: Contribution to journal › Article › peer-review

Open Access
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8 Citations (SciVal)

271 Downloads (Pure)