Plasma Therm 790 PECVD

    Facility/equipment: Equipment

    • LocationShow on map

      NANOFAB LAB University of Bath Claverton Down Bath BA2 7AY

      UK United Kingdom

    Equipments Details

    Description

    Plasma enhanced chemical vapour deposition of various inorganic thin films e.g. SiO2, SiNx.

    Details

    NameMake: Plasma Therm; Model: 790

    Equipment taxonomy

    • Chemical Vapour Deposition

    User-defined keywords

    • PECVD

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