Research output per year
Research output per year
Equipments Details
Description
Photo Lithography System
Details
| Name | Make: EULITHA; Model: PHABLER 100M |
|---|---|
| Acquisition date | 19/05/15 |
Equipment taxonomy
- Optical
Fingerprint
Explore the research areas in which this equipment has been used. These labels are generated based on the related outputs. Together they form a unique fingerprint.
Research output
- 1 Article
-
Influence of the reactor environment on the selective area thermal etching of GaN nanohole arrays
Coulon, P. M., Feng, P., Damilano, B., Vézian, S., Wang, T. & Shields, P. A., 27 Mar 2020, In: Scientific Reports. 10, 1, 5642.Research output: Contribution to journal › Article › peer-review
Open Access7 Citations (SciVal)