MJB-3 Mask Aligner

    Facility/equipment: Equipment

    • LocationShow on map

      NANOFAB LAB University of Bath Claverton Down Bath BA2 7AY

      UK United Kingdom

    Equipments Details


    MJB3 UV contact mask-aligner.
    Capabilities: exposure of thin and thick resist materials, ultimate resolution ~ 1um, substrates up to 75mm in diameter, masks up to 100 mm x 100 mm in size.


    NameMake: Karl Suss; Model: MJB-3
    Acquisition date13/11/13

    Equipment taxonomy

    • Optical


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