Equipments Details
Description
MJB3 UV contact mask-aligner.
Capabilities: exposure of thin and thick resist materials, ultimate resolution ~ 1um, substrates up to 75mm in diameter, masks up to 100 mm x 100 mm in size.
Capabilities: exposure of thin and thick resist materials, ultimate resolution ~ 1um, substrates up to 75mm in diameter, masks up to 100 mm x 100 mm in size.
Details
| Name | Make: Karl Suss; Model: MJB-3 |
|---|---|
| Acquisition date | 13/11/13 |
Equipment taxonomy
- Optical
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