MBJ 3 Karl Süss Mask Aligner

    Department of Physics

    Facility/equipment: Equipment

    • Location

      University of Bath Claverton Down Bath BA2 7AY

      UK United Kingdom

    Equipments Details

    Description

    Capabilities: exposure of thin and thick resist materials, ultimate resolution ~ 1μm, substrates up to 75mm in diameter, masks up to 100 mm x 100 mm in size.

    Contact information

    Phone01225 386956
    Emailsnanofab@bath.ac.uk
    LinksWebsite

    Terms of loan/booking

    Available for loan - internal and external

    Contact Stephen Wedge for details of costs.

    Fingerprint Explore the research areas in which this equipment has been used. These labels are generated based on the related outputs. Together they form a unique fingerprint.