MBJ 3 Karl Süss Mask Aligner

    Department of Physics

    Facility/equipment: Equipment

    • Location

      University of Bath Claverton Down Bath BA2 7AY

      UK United Kingdom

    Equipments Details

    Description

    Capabilities: exposure of thin and thick resist materials, ultimate resolution ~ 1μm, substrates up to 75mm in diameter, masks up to 100 mm x 100 mm in size.

    Contact information

    Phone01225 386956
    Emailsnanofab@bath.ac.uk
    LinksWebsite

    Terms of loan/booking

    Available for loan - internal and external

    Contact Stephen Wedge for details of costs.