HHV 500 sputter coater

    Department of Physics

    Facility/equipment: Equipment

    • Location

      University of Bath Claverton Down Bath BA2 7AY

      UK United Kingdom

    Description

    RF and DC sputtering tool. Includes reactive sputtering with oxygen and co-sputtering. Substrate heating facility.

    Contact information

    Phone01225 386956
    Emailsnanofab@bath.ac.uk
    LinksWebsite

    Terms of loan/booking

    Available for loan - internal and external

    Contact Stephen Wedge for details of costs.