HHV 500 sputter coater

    Facility/equipment: Equipment

    • LocationShow on map

      NANOFAB LAB University of Bath Claverton Down Bath BA2 7AY

      UK United Kingdom

    Equipments Details


    3 Source DC/RF sputter coater: Al, AZO, Co,Cr,Cu, Fe2O3, ITO, Nb, Pt, Py (Ni-Fe), Si3N4, SiO2, Ta, Ti, TiO2, WO3, ZN, ZnO targets avaiable.


    NameMake: HHV; Model: 500
    Acquisition date25/03/15

    Equipment taxonomy

    • Sputterer

    User-defined keywords

    • Sputter Coating


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