Equipments Details
Description
3 Source DC/RF sputter coater: Al, AZO, Co,Cr,Cu, Fe2O3, ITO, Nb, Pt, Py (Ni-Fe), Si3N4, SiO2, Ta, Ti, TiO2, WO3, ZN, ZnO targets avaiable.
Details
| Name | Make: HHV; Model: 500 |
|---|---|
| Acquisition date | 25/03/15 |
Equipment taxonomy
- Sputterer
User-defined keywords
- Sputter Coating
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