Heidelberg MPG101 Direct Laser Writer

    Facility/equipment: Equipment

    • LocationShow on map

      3 W ANNEX 2.2 University of Bath Claverton Down Bath BA2 7AY

      UK United Kingdom

    Equipments Details

    Description

    Direct Laser Writer: Maximum substrate of 4" wafer or 100 mm by 100 mm mask blank. 375 nm laser source for wide range of resists. Resolution of 1 um line-width. CAD formats of CIF, GDSII or BMP.

    Details

    NameMake: HEIDELBERG INSTRUMENTS; Model: MPG101
    Acquisition date13/11/13

    Equipment taxonomy

    • Laser (Direct-Write)

    User-defined keywords

    • Non-contact photo-lithography

    Fingerprint

    Explore the research areas in which this equipment has been used. These labels are generated based on the related outputs. Together they form a unique fingerprint.