Heidelberg Instruments μPG 101 Direct Laser Writer

    Department of Physics

    Facility/equipment: Equipment

    • Location

      University of Bath Claverton Down Bath BA2 7AY

      UK United Kingdom

    Equipments Details

    Description

    Capabilities: maskless lithography with sub-micron resolution, substrates up to 125 x 125 mm², 375 nm laser source for exposure of standard and UV resists such as SU-8, vector and raster exposure mode, 3D exposure mode available.

    Contact information

    Phone01225 386956
    Emailsnanofab@bath.ac.uk
    LinksWebsite

    Terms of loan/booking

    Available for loan - internal and external

    Contact Stephen Wedge for details of costs.

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