EVG 620 Semi-Automated Nano-Imprint Lithogrphy system

    Facility/equipment: Equipment

    • Location

      University of Bath Claverton Down Bath BA2 7AY

      UK United Kingdom

    Equipments Details


    EVG 620 Semi-automated Nano-Imprint Lithography System with SmartNIL(TM) tooling for UV-nanoimprint processes. It is capable of imprinting areas from 10x10 mm up to 150 mm diameter with a guaranteed resolution down to 50 nm. Replication is via intermediate soft stamps so is suitable for easy replication from rigid masters, e.g. Si wafers, mask plates etc.


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