Equipments Details
Description
The Nanofabrication Facility comprises a range of equipment within a suite of cleanrooms of ISO Class 6.
Photo- and nano- lithography is combined with etching and deposition to create structures for the fundamental studies of the electronic, magnetic and optical properties of materials, as well as devices such as Hall sensors or Light Emitting Diodes (LEDs).
Photo- and nano- lithography is combined with etching and deposition to create structures for the fundamental studies of the electronic, magnetic and optical properties of materials, as well as devices such as Hall sensors or Light Emitting Diodes (LEDs).
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Explore the research areas in which this equipment has been used. These labels are generated based on the related outputs. Together they form a unique fingerprint.
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Understanding resolution limit of Displacement Talbot Lithography
Chausse, P., Le Boulbar, E., Lis, S. & Shields, P., 4 Mar 2019, In: Optics Express. 27, 5, p. 5918-5930 13 p.Research output: Contribution to journal › Article › peer-review
Open Access31 Link opens in a new tab Citations (SciVal)8 Downloads (Pure) -
Deep UV Emission from Highly Ordered AlGaN/AlN Core–Shell Nanorods
Coulon, P.-M., Kusch, G., Martin, R. W. & Shields, P. A., 3 Oct 2018, In: ACS Applied Materials and Interfaces. 10, 39, p. 33441-33449 9 p.Research output: Contribution to journal › Article › peer-review
Open AccessFile38 Link opens in a new tab Citations (SciVal)178 Downloads (Pure) -
Hybrid top-down/bottom-up fabrication of a highly uniform and organized faceted AlN nanorod scaffold
Coulon, P.-M., Kusch, G., Fletcher, P., Chausse, P., Martin, R. W. & Shields, P. A., 5 Jul 2018, In: Materials. 11, 7, 1140.Research output: Contribution to journal › Article › peer-review
Open Access16 Link opens in a new tab Citations (SciVal) -
Hybrid top-down/bottom-up fabrication of regular arrays of AlN nanorods for deep-UV core-shell LEDs
Coulon, P.-M., Kusch, G., Le Boulbar, E., Chausse, P., Bryce, C. G., Martin, R. W. & Shields, P., 1 May 2018, In: Physica Status Solidi (B). 255, 5, 9 p., 1700445 .Research output: Contribution to journal › Article › peer-review
Open AccessFile20 Link opens in a new tab Citations (SciVal)120 Downloads (Pure) -
Optical characterization of magnesium incorporation in p-GaN layers for core-shell nanorod light-emitting diodes
Gîrgel, I., Šatka, A., Priesol, J., Coulon, P. M., Le Boulbar, E. D., Batten, T., Allsopp, D. W. E. & Shields, P. A., 20 Mar 2018, In: Journal of Physics D: Applied Physics. 51, 15, 155103.Research output: Contribution to journal › Article › peer-review
Open Access12 Link opens in a new tab Citations (SciVal)
Equipment
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OIPT Plasma Pro100 RIE/ICP
Facility/equipment: Equipment
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Plasma Therm 790 PECVD
Facility/equipment: Equipment