Dataset for "Displacement Talbot Lithography for nano-engineering of III-nitride materials"

Pierre-Marie Coulon (Creator)
Philip Shields (Project Leader)

Dataset

1 results

2019
Displacement Talbot Lithography for nano-engineering of III-nitride materials
Coulon, P.-M., Damilano, B., Alloing, B., Chausse, P., Walde, S., Enslin, J., Armstrong, R., Vézian, S., Hagedorn, S., Wernicke, T., Massies, J., Zúñiga-Pérez, J., Weyers, M., Kneissl, M. & Shields, P., 2 Dec 2019, In: Microsystems & Nanoengineering. 5, 1, 52.
Research output: Contribution to journal › Article › peer-review

Open Access
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