Research output per year
Research output per year
Description
This dataset contains scanning electron microscopy (SEM) images of nano-pillar-patterned sapphire created via Displacement Talbot Lithography and Inductively coupled plasma dry etching.
| Date made available | 13 Nov 2019 |
|---|---|
| Publisher | University of Bath |
Research output
- 1 Article
-
AlN overgrowth of nano-pillar-patterned sapphire with different offcut angle by metalorganic vapor phase epitaxy
Walde, S., Hagedorn, S., Coulon, P., Mogilatenko, A., Netzel, C., Weinrich, J., Susilo, N., Ziffer, E., Matiwe, L., Hartmann, C., Kusch, G., Alasmari, A., Naresh-kumar, G., Trager-cowan, C., Wernicke, T., Straubinger, T., Bickermann, M., Martin, R. W., Shields, P. A., Kneissl, M., & 1 others, 1 Feb 2020, In: Journal of Crystal Growth. 531, 125343.Research output: Contribution to journal › Article › peer-review
Open AccessFile12 Citations (SciVal)19 Downloads (Pure)
Projects
- 1 Finished
-
Manufacturing of Nano-Engineered III-N Semiconductors
Shields, P., Allsopp, D. & Wang, W.
Engineering and Physical Sciences Research Council
1/05/15 → 30/09/21
Project: Research council