Dataset for "AlN overgrowth of nano-pillar-patterned sapphire with different offcut angle by metalorganic vapor phase epitaxy"

Dataset

Description

This dataset contains scanning electron microscopy (SEM) images of nano-pillar-patterned sapphire created via Displacement Talbot Lithography and Inductively coupled plasma dry etching.
Date made available13 Nov 2019
PublisherUniversity of Bath

Research Output

AlN overgrowth of nano-pillar-patterned sapphire with different offcut angle by metalorganic vapor phase epitaxy

Walde, S., Hagedorn, S., Coulon, P., Mogilatenko, A., Netzel, C., Weinrich, J., Susilo, N., Ziffer, E., Matiwe, L., Hartmann, C., Kusch, G., Alasmari, A., Naresh-kumar, G., Trager-cowan, C., Wernicke, T., Straubinger, T., Bickermann, M., Martin, R. W., Shields, P. A., Kneissl, M. & 1 others, Weyers, M., 1 Feb 2020, In : Journal of Crystal Growth. 531, 125343.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Projects

  • Cite this

    Coulon, P. (Creator), Shields, P. (Project Leader) (13 Nov 2019). Dataset for "AlN overgrowth of nano-pillar-patterned sapphire with different offcut angle by metalorganic vapor phase epitaxy". University of Bath. 10.15125/BATH-00703