This dataset contains scanning electron microscopy (SEM) images of nano-pillar-patterned sapphire created via Displacement Talbot Lithography and Inductively coupled plasma dry etching.
|Date made available||13 Nov 2019|
|Publisher||University of Bath|
Coulon, P. (Creator), Shields, P. (Project Leader) (13 Nov 2019). Dataset for "AlN overgrowth of nano-pillar-patterned sapphire with different offcut angle by metalorganic vapor phase epitaxy". University of Bath. 10.15125/BATH-00703